Focused Ion Beam Lithography to Etch Nano-architectures into Microelectrodes
6.6K Views
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13:49 min
•
January 19th, 2020
DOI :
January 19th, 2020
•1Department of Electrical Engineering and Computer Science, University of Michigan, 2Veteran Affairs Ann Arbor Healthcare System, 3Department of Neurology, School of Medicine, University of Michigan, 4Department of Biomedical Engineering, University of Michigan, 5Michigan Center for Materials Characterization, University of Michigan, 6Carl Zeiss SMT, Inc.
Chapters in this video
0:04
Title
0:51
Aligning the Focus Ion Beam (FIB) to the Silicon Probes
9:46
Writing an Automated Process for Etching
11:28
Results: FIB Etched Nano-architecture on the Surfaces of Intracortical Probes and Microelectrodes Affects Neuron Density and Electrophysiology
13:08
Conclusion
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