Focused Ion Beam Lithography to Etch Nano-architectures into Microelectrodes
6.6K Views
•
13:49 min
•
January 19th, 2020
DOI :
January 19th, 2020
•1Department of Electrical Engineering and Computer Science, University of Michigan, 2Veteran Affairs Ann Arbor Healthcare System, 3Department of Neurology, School of Medicine, University of Michigan, 4Department of Biomedical Engineering, University of Michigan, 5Michigan Center for Materials Characterization, University of Michigan, 6Carl Zeiss SMT, Inc.
Chapters in this video
0:04
Title
0:51
Aligning the Focus Ion Beam (FIB) to the Silicon Probes
9:46
Writing an Automated Process for Etching
11:28
Results: FIB Etched Nano-architecture on the Surfaces of Intracortical Probes and Microelectrodes Affects Neuron Density and Electrophysiology
13:08
Conclusion
Related Videos
06:43
Writing and Low-Temperature Characterization of Oxide Nanostructures
9.9K Views
12:35
Atomically Traceable Nanostructure Fabrication
8.7K Views
08:12
Ohmic Contact Fabrication Using a Focused-ion Beam Technique and Electrical Characterization for Layer Semiconductor Nanostructures
12.2K Views
09:37
Microfabrication of Chip-sized Scaffolds for Three-dimensional Cell cultivation
11.7K Views
07:47
Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography
7.2K Views
10:58
Focused Ion Beam Fabrication of LiPON-based Solid-state Lithium-ion Nanobatteries for In Situ Testing
10.1K Views
10:25
Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
10.0K Views
07:23
Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics
5.7K Views
11:03
Nanoscale Characterization of Liquid-Solid Interfaces by Coupling Cryo-Focused Ion Beam Milling with Scanning Electron Microscopy and Spectroscopy
3.4K Views
09:30
Focused Ion Beams
8.9K Views
Copyright © 2025 MyJoVE Corporation. All rights reserved