Les auteurs tiennent à remercier Ryan Tung pour son aide et discussions techniques utiles. Les auteurs souhaitent également souligner l&#39;aide et le soutien du personnel technique Birck Nanotechnology Center. Ce travail a été financé par l&#39;Agence Defense Advanced Research Projects sous la Purdue Micro-ondes reconfigurable évanescent Mode cavité Filtres étude. Et aussi par le Centre de prévision NNSA de la fiabilité, l&#39;intégrité et la survie des microsystèmes et ministère de l&#39;Énergie sous Prix Nombre DE-FC5208NA28617. Les vues, les opinions et / ou les conclusions contenues dans le présent document / présentation sont celles des auteurs / présentateurs et ne doivent pas être interprétées comme représentant l&#39;opinion ou les politiques officielles, explicite ou implicite, de l&#39;Agence pour les projets de recherche avancée de défense ou le ministère de la Défense.

<ol>
	<li>Rebeiz, G. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=.">.</a> RF MEMS: Theory, Design, and Technology. , (2003).</li><li>Senturia, S. D. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=.">.</a> Microsystem Design. , (2001).</li><li>Bouchaud, J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=.">.</a> Propelled by HP Inkjet Sales, STMicroelectronics Remains Top MEMS Foundry. , (2011).</li><li>Lantowski, K. G. D. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=The+Future+of+Cinema+Has+Arrived:+More+Than+50,000.">The Future of Cinema Has Arrived: More Than 50,000.</a> Theatre Screens Worldwide Feature The Brightest, 2D/3D Digital Cinema Experience With DLP Cinema. , (2011).</li><li>Bosch-Wachtel, T. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=.">.</a> Knowles Ships 2 Billionth SiSonic MEMS Microphone. , (2011).</li><li>Burke, J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=.">.</a> Mirasol Display Capabilities Add Color and Interactivity to Improve User Experience for Renowned Jin Yong Branded Device. , (2012).</li><li>Bettler, D. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=.">.</a> MEMStronics Captures Prestigious R &amp; D 100 Award. , (2011).</li><li>Marsh, C. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=.">.</a> Omron Releases New RF MEMS Switch with Superior High Frequency Characteristics rated to 100 Million Operations. , (2008).</li><li>Rosa, M. A., Bruyker, D. D., Volkel, A. R., Peeters, E., Dunec, J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=A+novel+external+electrode+configuration+for+the+electrostatic+actuation+of+MEMS+based+devices.">A novel external electrode configuration for the electrostatic actuation of MEMS based devices.</a> J. Micromech. Microeng. 14, 446-451 (2004).</li><li>Rottenberg, X., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Electrostatic+fringing-field+actuator+(EFFA):+application+towards+a+low-complexity+thin+film+RF-MEMS+technology.">Electrostatic fringing-field actuator (EFFA): application towards a low-complexity thin film RF-MEMS technology.</a> J. Micromech. Microeng. 17, S204-S210 (2007).</li><li>Allen, W. N., Small, J., Liu, X., Peroulis, D. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Bandwidth-optimal+single+shunt-capacitor+matching+networks+for+parallel+RC+loads+of+Q+&gt;&gt;+1.">Bandwidth-optimal single shunt-capacitor matching networks for parallel RC loads of Q &gt;&gt; 1.</a> Asia-Pacific Microw. Conf (Singapore). , 2128-2131 (2009).</li><li>Small, J., Liu, X., Garg, A., Peroulis, D. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Electrostatically+tunable+analog+single+crystal+silicon+fringing-field+MEMS+varactor.">Electrostatically tunable analog single crystal silicon fringing-field MEMS varactor.</a> Asia-Pacific Microw Conf (Singapore). , 575-578 (2009).</li><li>Liu, X., Small, J., Berdy, D., Katehi, L. P. B., Chappell, W. J., Peroulis, D. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Impact+of+mechanical+vibration+on+the+performance+of+RF+MEMS+evanescent-mode+tunable+resonators.">Impact of mechanical vibration on the performance of RF MEMS evanescent-mode tunable resonators.</a> IEEE Microw. Wireless Compon. Lett. 21, 406-408 (2011).</li><li>Small, J., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Electrostatic+fringing+field+actuation+for+pull-in+free+RF-MEMS+analog+tunable+resonators.">Electrostatic fringing field actuation for pull-in free RF-MEMS analog tunable resonators.</a> J. Micromech. Microeng. 22, 095004 (2012).</li><li>Su, J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=.">.</a> A lateral-drive method to address pull-in failure in MEMS. , (2008).</li><li>Scott, S., Peroulis, D. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=A+capacitively-loaded+MEMS+slot+element+for+wireless+temperature+sensing+of+up+to+300&#176;C+.">A capacitively-loaded MEMS slot element for wireless temperature sensing of up to 300&#176;C .</a> , 1161-1164 (2009).</li><li>Scott, S., Sadeghi, F., Peroulis, D. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Inherently-robust+300C+MEMS+sensor+for+wireless+health+monitoring+of+ball+and+rolling+element+bearings.">Inherently-robust 300C MEMS sensor for wireless health monitoring of ball and rolling element bearings.</a> , 975-978 (2009).</li><li>Lee, K. B. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Non-contact+electrostatic+microactuator+using+slit+structures:+theory+and+a+preliminary+test.">Non-contact electrostatic microactuator using slit structures: theory and a preliminary test.</a> J. Micromech. Microeng. 17, 2186-2196 (2007).</li><li>Su, J., Yang, H., Fay, P., Porod, W., Berstein, G. H. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=A+surface+micromachined+offset-drive+method+to+extend+the+electrostatic+travel+range.">A surface micromachined offset-drive method to extend the electrostatic travel range.</a> J. Micromech. Microeng. 20, 015004 (2010).</li><li>Small, J., Fruehling, A., Garg, A., Liu, X., Peroulis, D. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=DC-dynamic+biasing+for+&gt;50x+switching+time+improvement+in+severely+underdamped+fringing-field+electrostatic+MEMS+actuators.">DC-dynamic biasing for &gt;50x switching time improvement in severely underdamped fringing-field electrostatic MEMS actuators.</a> J. Micromech. Microeng. 22, (2012).</li><li>Borovic, B., Liu, A. Q., Popa, D., Cai, H., Lewis, F. L. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Open-loop+versus+closed-loop+control+of+MEMS+devices:+Choices+and+issues.">Open-loop versus closed-loop control of MEMS devices: Choices and issues.</a> J. Micromech. Microeng. 15, 1917-1924 (2005).</li><li>Pons-Nin, J., Rodriquez, A., Castaner, L. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Voltage+and+pull-in+time+in+current+drive+of+electrostatic+actuators.">Voltage and pull-in time in current drive of electrostatic actuators.</a> J. Microelectromech. Syst. 11, 196-205 (2002).</li><li>Czaplewski, D. A., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=A+Soft+Landing+Waveform+for+Actuation+of+a+Single-Pole+Single-Throw+Ohmic+RF+MEMS+Switch.">A Soft Landing Waveform for Actuation of a Single-Pole Single-Throw Ohmic RF MEMS Switch.</a> J. Microelectromech. Syst. 15, 1586-1594 (2006).</li><li>Elata, D., Bamberger, H. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=On+the+dynamic+pull-in+of+electrostatic+actuators+with+multiple+degrees+of+freedom+and+multiple+voltage+sources.">On the dynamic pull-in of electrostatic actuators with multiple degrees of freedom and multiple voltage sources.</a> J. Microelectromech. Syst. 15, 131-140 (2006).</li><li>Chen, K. S., Ou, K. S. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Fast+positioning+and+impact+minimizing+of+MEMS+devices+by+suppression+motion-induced+vibration+by+command+shaping+method.">Fast positioning and impact minimizing of MEMS devices by suppression motion-induced vibration by command shaping method.</a> , 1103-1106 (2009).</li><li>Chen, K. S., Yang, T. S., Yin, J. F. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Residual+vibration+suppression+for+duffing+nonlinear+systems+with+electromagnetical+actuation+using+nonlinear+command+shaping+techniques.">Residual vibration suppression for duffing nonlinear systems with electromagnetical actuation using nonlinear command shaping techniques.</a> ASME J. Vibration and Acoustics. 128, 778-789 (2006).</li><li>. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=.">.</a> Transene Sulfite Gold TSG-250. Product Number: 110-TSG-250. , (2012).</li><li>. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=.">.</a> Gold etchant type TFA. Product Number: 060-0015000. , (2012).</li><li>Garg, A., Small, J., Mahapatro, A., Liu, X., Peroulis, D. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Impact+of+sacrificial+layer+type+on+thin+film+metal+residual+stress.">Impact of sacrificial layer type on thin film metal residual stress.</a> , 1052-1055 (2009).</li></ol>

Les auteurs n&#39;ont rien à divulguer.

Faible contrainte résiduelle Au dépôt du film et une libération sec avec XeF2 sont des éléments gravement à la fabrication réussie de l&#39;appareil. Actionneurs frangeant champ électrostatique fournissent des forces relativement faibles par rapport aux actionneurs terrain à plaques parallèles. MEMS typiques minces contraintes de films&gt; 60 MPa donneront lieu à des tensions élevées de l&#39;entraînement qui peuvent potentiellement compromettre la fiabilité de l&#39;EFFA MEMS. Pour cette rais...

Systèmes micro-électromécaniques (MEMS) utilisent plusieurs mécanismes d&#39;actionnement de réaliser un déplacement mécanique. Les plus populaires sont, thermique, piézoélectrique, magnétostatique et électrostatique. Pour peu de temps de commutation, actionnement électrostatique est la technique la plus populaire 1, 2. Dans la pratique, la conception mécanique critique amorties offrent le meilleur compromis entre le temps de montée initiale et le temps de stabilisation. Lors de l&#39;application de la polarisation continue et l&#39;actionnement de la membrane vers le bas vers l&#39;électrode déroulant, le temps de stabilisation n&#39;est pas un problème important que la membrane se casser vers le bas et adhérer à l&#39;électrode d&#39;actionnement enduit diélectrique. Plusieurs applications ont bénéficié de la conception d&#39;actionnement électrostatique précitée 3-8. Cependant, la présence de l&#39;électrode revêtue déroulant diélectrique rend l&#39;actionneur sensible à la charge diélectrique et le blocage par adhérence. Membranes MEMS peuvent utiliser un uconception mécanique nderdamped d&#39;atteindre un temps de montée initiale rapide. Un exemple d&#39;une conception mécanique sous-amorti est le champ de dispersion commande électrostatique (EFFA) MEMS. Cette topologie a exposé beaucoup moins vulnérabilité aux mécanismes de défaillance typiques qui affligent conceptions basées électrostatiques 9-20. L&#39;absence de la contre-électrode parallèle et par conséquent, le champ électrique parallèle est la raison pour laquelle ces MEMS sont appelées de façon appropriée &quot;champ de dispersion&quot; actionné (figure 1). Pour la conception EFFA, l&#39;électrode d&#39;excursion basse est divisée en deux électrodes séparées qui sont disposées décalées latéralement de la membrane mobile, ce qui élimine complètement le chevauchement entre les parties mobiles et fixes du dispositif. Cependant, l&#39;élimination du substrat du dessous de la membrane mobile permet de réduire considérablement le film de compression élément d&#39;amortissement augmentant ainsi le temps de décantation. Figure 2B est un exemple d&#39;un temps de stabilisation en réponse à standard étape de sollicitation. Transitoire, ou DC-dynamique de polarisation appliquées en temps réel peut être utilisé pour améliorer le temps de décantation 20-26. Figures 2C et 2D illustrent qualitativement comment une forme d&#39;onde variant de temps peut effectivement annuler la sonnerie. Efforts de recherche antérieurs utilisent des méthodes numériques pour calculer la tension précise et les horaires de la polarisation d&#39;entrée pour améliorer le temps de commutation. Le procédé utilise dans cet ouvrage compacts expressions de forme fermée pour calculer les paramètres de forme d&#39;onde de polarisation d&#39;entrée. En outre, des travaux antérieurs a porté sur plaques parallèles actionnement. Bien que les structures sont conçues pour être sous-amorti, presser film amortissement est toujours disponible dans cette configuration. La méthode d&#39;actionnement présentée dans ce travail est champ de dispersion actionnement. Dans cette configuration resserrement film amortissement est effectivement éliminé. Il s&#39;agit d&#39;un cas extrême où l&#39;amortissement mécanique de la poutre MEMS est très faible. Cet article décrit comment fabriquer le dev EFFA MEMSglaces et d&#39;effectuer la mesure de valider expérimentalement le concept de forme d&#39;onde.

<table border="0" cellpadding="0" cellspacing="0" width="746">
	<tbody>
		<tr height="21">
			<td height="21" style="height:21px;width:251px;">Chemical</td>
			<td style="width:163px;">Company</td>
			<td style="width:137px;">Catalogue number</td>
			<td style="width:195px;">Comments (optional)</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;">Buffered oxide etchant</td>
			<td>Mallinckrodt Baker</td>
			<td>1178</td>
			<td>Silicon dioxide etch, Ti etch</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Acetone</td>
			<td>Mallinckrodt Baker</td>
			<td>5356</td>
			<td>wafer clean</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Isopropyl alcohol</td>
			<td>Honeywell</td>
			<td>BDH-140</td>
			<td>wafer clean</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Hexamethyldisilizane</td>
			<td>Mallinckrodt Baker</td>
			<td>5797</td>
			<td>adhesion promoter</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;">Microposit SC 1827 Positive Photoresist</td>
			<td>Shipley Europe Ltd</td>
			<td>44090</td>
			<td>Pattern, electroplating</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Microposit MF-26A developer</td>
			<td>Shipley Europe Ltd</td>
			<td>31200</td>
			<td>Develop SC 1827</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Tetramethylammonium hydroxide</td>
			<td>Sigma-Aldrich</td>
			<td>334901</td>
			<td>Bulk Si etch</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Hydrofluroic acid</td>
			<td>Sciencelab.com</td>
			<td>SLH2227</td>
			<td>Silicon dioxide etch</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Sulfuric acid</td>
			<td>Sciencelab.com</td>
			<td>SLS2539</td>
			<td>wafer clean</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Hydrogen peroxide</td>
			<td>Sciencelab.com</td>
			<td>SLH1552</td>
			<td>Wafer clean</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Transene Sulfite Gold TSG-250</td>
			<td>Transense</td>
			<td>110-TSG-250</td>
			<td>Au electroplating solution</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Baker PRS-3000 Positive Resist Stripper</td>
			<td>Mallinckrodt Baker</td>
			<td>6403</td>
			<td>Photoresist stripper</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Gold etchant type TFA</td>
			<td>Transense</td>
			<td>060-0015000</td>
			<td>Au etch</td>
		</tr>
	</tbody>
</table>

real-time dc-dynamic biasing method for switching time improvement in severely underdamped fringing-field electrostatic mems actuators

Mécaniquement MEMS franges de champ électrostatique-sous-amorti actionneurs sont bien connus pour leur opération de commutation rapide en réponse à une tension de polarisation d&#39;entrée en échelon unitaire. Toutefois, le compromis entre les performances de commutation amélioré est un temps relativement long pour atteindre chaque régler la hauteur de la fente en réponse à différentes tensions appliquées. Transitoire appliqué des formes d&#39;onde de polarisation sont utilisés pour faciliter des temps de commutation réduits pour les MEMS électrostatiques franges champ actionneurs présentant des facteurs de qualité mécaniques élevées. Retrait du substrat sous-jacent de l&#39;actionneur champ de dispersion crée l&#39;environnement d&#39;amortissement mécanique faible est nécessaire de tester efficacement le concept. Le retrait du substrat sous-jacent a également une amélioration substantielle du rendement de la fiabilité du dispositif en ce qui concerne une défaillance due à un frottement statique. Bien polarisation DC-dynamique est utile pour améliorer le temps de stabilisation, les vitesses de balayage nécessaires pour les appareils typiques de MEMS peuvent imposer des exigences agressives sur la charge pompes pour entièrement intégrés conceptions sur la puce. En outre, il peut y avoir des défis intégrant l&#39;étape d&#39;élimination du substrat dans les CMOS commerciales étapes d&#39;arrière-plan de ligne de traitement. Validation expérimentale des actionneurs fabriqués démontre une amélioration de 50x en temps de commutation par rapport à l&#39;étape de polarisation des résultats classiques. Par rapport aux calculs théoriques, les résultats expérimentaux sont en bon accord.

La configuration de la figure 4 est utilisée pour capturer la déviation par rapport à des caractéristiques temporelles des ponts MEMS. En utilisant le laser doppler vibromètre dans son mode de mesure en continu, les paramètres de tension et de temps précises peuvent être trouvés à entraîner l&#39;oscillation du faisceau minimum à la hauteur de l&#39;intervalle souhaité. Figure 5 illustre une déviation exemple de faisceau correspondant à la hauteur de 60 V d&#39;écart. On...

Watch this Scientific Journal Video about Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators at JoVE.com

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

La conception du dispositif robuste de franges-champ électrostatique actionneurs MEMS résultats dans des conditions d&#39;amortissement retrait films intrinsèquement faible et longs de décantation pour effectuer des opérations de commutation à l&#39;aide de polarisation de l&#39;étape classique. L&#39;amélioration de la commutation du temps avec des formes d&#39;onde DC-dynamiques en temps réel réduit le temps de stabilisation de champ de dispersion MEMS actionneurs lors de la transition entre la mise à bas et terre-à-up États.

Real-Time DC-dynamique Méthode de sollicitation pour Temps de commutation amélioration de franges champ gravement sous-amorti électrostatiques MEMS Actionneurs

Mechanically underdamped electrostatic fringing-field MEMS actuators are well known for their fast switching operation in response to a unit step input ...

real-time-dc-dynamic-biasing-method-for-switching-time-improvement

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JoVE Journal

Engineering

10.2K vues.  University of California, Davis.  La conception du dispositif robuste de franges-champ électrostatique actionneurs MEMS résultats dans des conditions d'amortissement retrait films intrinsèquement faible et longs de décantation pour effectuer des opérations de commutation à l'aide de polarisation de l'étape classique. L'amélioration de la commutation du temps avec des formes d'onde DC-dynamiques en temps réel réduit le temps de stabilisation de champ de dispersion MEMS action...

Vidéo: Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

Fabrication Process of Silicone-based Dielectric Elastomer Actuators

This contribution demonstrates the fabrication process of dielectric elastomer transducers (DETs). DETs are stretchable capacitors consisting of an elastomeric dielectric membrane sandwiched between two compliant electrodes. The large actuation strains of these transducers when used as actuators (over 300% area strain) and their soft and compliant nature has been exploited for a wide range of applications, including electrically tunable optics, haptic feedback devices, wave-energy harvesting, deformable cell-culture devices, compliant grippers, and propulsion of a bio-inspired fish-like airship. In most cases, DETs are made with a commercial proprietary acrylic elastomer and with hand-applied electrodes of carbon powder or carbon grease. This combination leads to non-reproducible and slow actuators exhibiting viscoelastic creep and a short lifetime. We present here a complete process flow for the reproducible fabrication of DETs based on thin elastomeric silicone films, including casting of thin silicone membranes, membrane release and prestretching, patterning of robust compliant electrodes, assembly and testing. The membranes are cast on flexible polyethylene terephthalate (PET) substrates coated with a water-soluble sacrificial layer for ease of release. The electrodes consist of carbon black particles dispersed into a silicone matrix and patterned using a stamping technique, which leads to precisely-defined compliant electrodes that present a high adhesion to the dielectric membrane on which they are applied.

This manuscript shows the fabrication process for the manufacture of dielectric elastomer soft actuators based on silicone membranes. The three key stages of production are presented in detail: blade casting of thin silicone membranes; pad printing of compliant electrodes; and the assembly of all the components.

Processus de fabrication des élastomères diélectriques Actionneurs à base de silicone

This contribution demonstrates the fabrication process of dielectric elastomer transducers (DETs). DETs are stretchable capacitors consisting of an ...

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Ingénierie

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

A micro-electro-mechanical-system (MEMS) is a widely used component in many industries, including energy, biotechnology, medical, communications, and automotive. However, effective inspection and characterization metrology systems are needed to ensure the functional reliability of MEMS. This study presents a system based on digital holography as a tool for MEMS metrology. Digital holography has gained increasing attention in the past 20 years. With the fast development and decreasing cost of sensor arrays, resolution of such systems has increased broadening potential applications. Thus, it has attracted attention from both research and industry sides as a potential reliable tool for industrial metrology. Indeed, by recording the interference pattern between an object beam (which contains sample height information) and a reference beam on a CCD camera, one can retrieve the quantitative phase information of an object. However, most of digital holographic systems are bulky and thus not easy to implement on industry production lines. The novelty of the system presented is that it is lens-less and thus very compact. In this study, it is shown that the Compact Digital Holographic Microscope (CDHM) can be used to evaluate several characteristics typically consider as criteria in MEMS inspections. The surface profiles of MEMS in both static and dynamic conditions are presented. Comparison with AFM is investigated to validate the accuracy of the CDHM.

We present a compact reflection digital holographic system (CDHM) for inspection and characterization of MEMS devices. A lens-less design using a diverging input wave providing natural geometrical magnification is demonstrated. Both static and dynamic studies are presented.

Compact numérique Holographic Microscope pour les MEMS Inspection et caractérisation de Lens-moins

A micro-electro-mechanical-system (MEMS) is a widely used component in many industries, including energy, biotechnology, medical, communications, and ...

Free-form Light Actuators &#8212; Fabrication and Control of Actuation in Microscopic Scale

Liquid crystalline elastomers (LCEs) are smart materials capable of reversible shape-change in response to external stimuli, and have attracted researchers&#39; attention in many fields. Most of the studies focused on macroscopic LCE structures (films, fibers) and their miniaturization is still in its infancy. Recently developed lithography techniques, e.g., mask exposure and replica molding, only allow for creating 2D structures on LCE thin films. Direct laser writing (DLW) opens access to truly 3D fabrication in the microscopic scale. However, controlling the actuation topology and dynamics at the same length scale remains a challenge.
In this paper we report on a method to control the liquid crystal (LC) molecular alignment in the LCE microstructures of arbitrary three-dimensional shape. This was made possible by a combination of direct laser writing for both the LCE structures as well as for micrograting patterns inducing local LC alignment. Several types of grating patterns were used to introduce different LC alignments, which can be subsequently patterned into the LCE structures. This protocol allows one to obtain LCE microstructures with engineered alignments able to perform multiple opto-mechanical actuation, thus being capable of multiple functionalities. Applications can be foreseen in the fields of tunable photonics, micro-robotics, lab-on-chip technology and others.

Free-form Light Actuators &amp;#8212; Fabrication and Control of Actuation in Microscopic Scale

Here, we fabricate 3D polymeric micro/nano structures in which both the shape and the molecular alignment can be engineered with nanometer scale accuracy by the use of direct laser writing. Light induced deformation of several types of liquid crystalline elastomer microstructures can be controlled in the microscopic scale.

Free-forme légère Actionneurs - Fabrication et contrôle des Actuation dans l&#39;échelle microscopique

Liquid crystalline elastomers (LCEs) are smart materials capable of reversible shape-change in response to external stimuli, and have attracted ...

Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)

A wide range of carbon sources are available in nature, with a variety of micro-/nanostructure configurations. Here, a novel technique to fabricate long and hollow glassy carbon microfibers derived from human hairs is introduced. The long and hollow carbon structures were made by the pyrolysis of human hair at 900 &#176;C in a N2 atmosphere. The morphology and chemical composition of natural and pyrolyzed human hairs were investigated using scanning electron microscopy (SEM) and electron-dispersive X-ray spectroscopy (EDX), respectively, to estimate the physical and chemical changes due to pyrolysis. Raman spectroscopy was used to confirm the glassy nature of the carbon microstructures. Pyrolyzed hair carbon was introduced to modify screen-printed carbon electrodes ; the modified electrodes were then applied to the electrochemical sensing of dopamine and ascorbic acid. Sensing performance of the modified sensors was improved as compared to the unmodified sensors. To obtain the desired carbon structure design, carbon micro-/nanoelectromechanical system (C-MEMS/C-NEMS) technology was developed. The most common C-MEMS/C-NEMS fabrication process consists of two steps: (i) the patterning of a carbon-rich base material, such as a photosensitive polymer, using photolithography; and (ii) carbonization through the pyrolysis of the patterned polymer in an oxygen-free environment. The C-MEMS/NEMS process has been widely used to develop microelectronic devices for various applications, including in micro-batteries, supercapacitors, glucose sensors, gas sensors, fuel cells, and triboelectric nanogenerators. Here, recent developments of a high-aspect ratio solid and hollow carbon microstructures with SU8 photoresists are discussed. The structural shrinkage during pyrolysis was investigated using confocal microscopy and SEM. Raman spectroscopy was used to confirm the crystallinity of the structure, and the atomic percentage of the elements present in the material before and after pyrolysis was measured using EDX.

Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS

Long and hollow glassy carbon microfibers were fabricated based on the pyrolysis of a natural product, human hair. The two fabrication steps of carbon microelectromechanical and carbon nanoelectromechanical systems, or C-MEMS and C-NEMS, are: (i) photolithography of a carbon-rich polymer precursor and (ii) pyrolysis of the patterned polymer precursor.

Fabrication de systèmes microélectromécaniques en carbone 3D (C-MEMS)

A wide range of carbon sources are available in nature, with a variety of micro-/nanostructure configurations. Here, a novel technique to fabricate long ...

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Here, we demonstrate the advantages of the laser Doppler vibrometer (LDV) over conventional techniques (the network analyzer), as well as the techniques to create an application-based microelectromechanical systems (MEMS) filter and how to use it efficiently (i.e., tuning the tuning-capability and avoiding both failure and stiction). LDV enables crucial measurements that are impossible with the network analyzer, such as higher mode detection (highly sensitive biosensor application) and resonance measurement for very small devices (fast prototyping). Accordingly, LDV was used to characterize the frequency tuning range and resonance frequency at different modes of the MEMS filters built for this study. This wide range frequency tuning mechanism is based simply on Joule heating from the embedded heaters and relatively high thermal stress with respect to the temperature of a fixed-fixed beam. However, we demonstrate that another limitation of this method is the resulting high thermal stress, which can burn the devices. Further improvement was achieved and shown for the first time in this study, such that the tuning capability was increased by 32% through an increase in the applied DC bias voltage (25 V to 35 V) between the two adjacent beams. This important finding eliminates the need for the extra Joule heating at the wider frequency tuning range. Another possible failure is through stiction and requirement of structure optimization: We propose a simple and easy technique of low frequency square wave signal application that can successfully separate the beams and eliminates the need for the more sophisticated and complicated methods given in the literature. The above findings necessitate a design methodology, and so we also provide an application-based design.

A protocol for a fixed-fixed beam design using a laser Doppler vibrometer (LDV), including the measurement of frequency tuning, modification of tuning capability, and avoidance of device failure and stiction, is presented. The superiority of the LDV method over the network analyzer is demonstrated due to its higher mode capability.

Méthodologie de conception et caractérisation pour filtres MEMS Tunable efficace Wide Range

Here, we demonstrate the advantages of the laser Doppler vibrometer (LDV) over conventional techniques (the network analyzer), as well as the techniques ...

Fabrication of Soft Pneumatic Network Actuators with Oblique Chambers

Soft pneumatic network actuators have become one of the most promising actuation devices in soft robotics which benefits from their large bending deformation and low input. However, their monotonous bending motion form in two-dimensional (2-D) space keeps them away from wide applications. This paper presents a detailed fabrication method of soft pneumatic network actuators with oblique chambers, to explore their motions in three-dimensional (3-D) space. The design of oblique chambers enables actuators with tunable coupled bending and twisting capabilities, which gives them the possibility to move dexterously in flexible manipulators, to become biologically inspired robots and medical devices. The fabrication process is based on the molding method, including the silicone elastomer preparation, chamber and base parts fabrication, actuator assembly, tubing connections, checks for leaks, and actuator repair. The fabrication method guarantees the rapid manufacturing of a series of actuators with only a few modifications in the molds. The test results show the high quality of the actuators and their prominent bending and twisting capabilities. Experiments of the gripper demonstrate the advantages of the development in adapting to objects with different diameters and providing sufficient friction.

Here we present a fabrication method of soft pneumatic network actuators with oblique chambers. The actuators are capable of generating coupled bending and twisting motions, which broadens their application in soft robotics.

Fabrication de doux réseau pneumatique actionneurs avec chambres Oblique

Soft pneumatic network actuators have become one of the most promising actuation devices in soft robotics which benefits from their large bending ...

Optimized Sealing Process and Real-Time Monitoring of Glass-to-Metal Seal Structures

Residual stress is an essential factor to keeping the hermeticity and robustness of a glass-to-metal seal structure. The purpose of this report is to demonstrate a novel protocol to characterize and measure residual stress in a glass-to-metal seal structure without destroying the insulation and hermeticity of sealing materials. In this research, a femto-laser inscribed fiber Bragg grating sensor is used. The glass-to-metal seal structure that is measured consists of a metal shell, sealing glass, and Kovar conductor. To make the measurements worthwhile, the specific heat treatment of metal-to-glass seal (MTGS) structure is explored to obtain the model with best hermeticity. Then, the FBG sensor is embedded into the path of sealing glass and becomes well-fused with the glass as the temperature cools to RT. The Bragg wavelength of FBG shifts with the residual stress generated in sealing the glass. To calculate the residual stress, the relationship between Bragg wavelength shift and strain is applied, and the finite element method is also used to make the results reliable. The online monitoring experiments of residual stress in sealing glass are carried out at different loads, such as high temperature and high pressure, to broaden functions of this protocol in harsh environments.

Key procedures to optimize the sealing process and achieve real-time monitoring of the metal-to-glass seal (MTGS) structure are described in detail. The embedded fiber Bragg grating (FBG) sensor is designed to achieve online monitoring of temperature and high-level residual stress in the MTGS with simultaneous environmental pressure monitoring.

Processus d'étanchéité optimisé et surveillance en temps réel des structures d'étanchéité de verre à métal

Residual stress is an essential factor to keeping the hermeticity and robustness of a glass-to-metal seal structure. The purpose of this report is to ...

Rapid Manufacturing of Thin Soft Pneumatic Actuators and Robots

This protocol describes a method for rapid manufacturing of soft pneumatic actuators and robots with an ultrathin form factor using a heat press and a laser cutter machine. The method starts with the lamination of thermoplastic polyurethane (TPU) sheets using a heat press for 10 min at the temperature of ~93 &#176;C. Next, the parameters of the laser cutter machine are optimized to produce a rectangular balloon with maximum burst pressure. Using the optimized parameters, the soft actuators are laser cut/welded three times sequentially. Next, a dispensing needle is attached to the actuator, allowing it to be inflated. The effect of geometrical parameters on the deflection of the actuator are studied systematically by varying the channel width and length. Finally, the performance of the actuator is characterized using an optical camera and a fluid dispenser. Conventional fabrication methods of soft pneumatic actuators based on silicone molding are time consuming (several hours). They also result in strong but bulky actuators, which limits the actuator&#8217;s applications. Moreover, microfabrication of thin pneumatic actuators is both time-consuming and expensive. The proposed manufacturing method in the current work resolves these issues by introducing a fast, simple, and cost-effective fabrication method of ultrathin pneumatic actuators.

This protocol describes a method for rapid manufacturing of soft pneumatic actuators and robots with a thin form factor. The fabrication method starts with lamination of thermoplastic polyurethane (TPU) sheets followed by laser cutting/welding of a two-dimensional pattern to form actuators and robots.

Fabrication rapide d'actionneurs et de robots pneumatiques souples minces

This protocol describes a method for rapid manufacturing of soft pneumatic actuators and robots with an ultrathin form factor using a heat press and a ...

In Situ Transmission Electron Microscopy with Biasing and Fabrication of Asymmetric Crossbars Based on Mixed-Phased a-VOx

Resistive switching crossbar architecture is highly desired in the field of digital memories due to low cost and high-density benefits. Different materials show variability in resistive switching properties due to the intrinsic nature of the material used, leading to discrepancies in the field because of underlying operation mechanisms. This highlights a need for a reliable technique to understand mechanisms using nanostructural observations. This protocol explains a detailed process and methodology of in&#160;situ nanostructural analysis as a result of electrical biasing using transmission electron microscopy (TEM). It provides visual and reliable evidence of underlying nanostructural changes in real time memory operations. Also included is the methodology of fabrication and electrical characterizations for asymmetric crossbar structures incorporating amorphous vanadium oxide. The protocol explained here for vanadium oxide films can be easily extended to any other materials in a metal-dielectric-metal sandwiched structure. Resistive switching crossbars are predicted to serve the programmable logic and neuromorphic circuits for next-generation memory devices, given the understanding of the operation mechanisms. This protocol reveals the switching mechanism in a reliable, timely, and cost-effective way in any type of resistive switching materials, and thereby predicts the device&#39;s applicability.

In Situ Transmission Electron Microscopy with Biasing and Fabrication of Asymmetric Crossbars Based on Mixed-Phased a-VOx

Presented here is a protocol for analyzing nanostructural changes during in&#160;situ biasing with transmission electron microscopy (TEM) for a stacked metal-insulator-metal structure. It has significant applications in resistive switching crossbars for the next generation of programmable logic circuits and neuromimicking hardware, to reveal their underlying operation mechanisms and practical applicability.

Microscopie électronique de transmission in situ avec biais et fabrication de barres transversales asymétriques basées sur la phase mixte a-VOx

Resistive switching crossbar architecture is highly desired in the field of digital memories due to low cost and high-density benefits. Different ...

Fabrication of Carbon-Based Ionic Electromechanically Active Soft Actuators

Ionic electromechanically active capacitive laminates are a type of smart material that move in response to electrical stimulation. Due to the soft, compliant and biomimetic nature of this deformation, actuators made of the laminate have received increasing interest in soft robotics and (bio)medical applications. However, methods to easily fabricate the active material in large (even industrial) quantities and with a high batch-to-batch and within-batch repeatability are needed to transfer the knowledge from laboratory to industry. This protocol describes a simple, industrially scalable and reproducible method for the fabrication of ionic carbon-based electromechanically active capacitive laminates and the preparation of actuators made thereof. The inclusion of a passive and chemically inert (insoluble) middle layer (e.g., a textile-reinforced polymer network or microporous Teflon) distinguishes the method from others. The protocol is divided into five steps: membrane preparation, electrode preparation, current collector attachment, cutting and shaping, and actuation. Following the protocol results in an active material that can, for example, compliantly grasp and hold a randomly shaped object as demonstrated in the article.

This article describes a fast and simple manufacturing process of ionic electromechanically active composite materials for actuators in biomedical, biomimetic and soft robotics applications. The key fabrication steps, their importance for the actuators&#39; final properties, and some of the main characterization techniques are described in detail.

Fabrication d’actionneurs mous électromécaniquement électromécaniques à base de carbone

Ionic electromechanically active capacitive laminates are a type of smart material that move in response to electrical stimulation. Due to the soft, ...