This work was supported jointly by the Converging Research Center Program through the Ministry of Science, ICT and Future Planning, Korea (NRF-2014M3C1A8048817) and R&amp;D Convergence Program of NST (National Research Council of Science and Technology) of Republic of Korea (CAP-14-3-KRISS).

Caution: Please follow all appropriate safety practices while assembling the equipment and sample chambers. Please wear personal protective equipment (safety glasses, gloves, safety shoes, etc.).
1. Fabrication of a Sample Vacuum Chamber
<ol>
	<li>Design and fabrication of the vacuum chamber
	<ol>
		<li>Prepare and submit design drawings to a commercial vendor or an in-house machine shop for manufacturing the sample vacuum chamber. A representative example of the de...

<ol>
	<li>Mamun, M. A., Elmustafa, A. A., Stutzman, M. L., Adderley, P. A., Poelker, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Effect+of+heat+treatments+and+coatings+on+the+outgassing+rate+of+stainless+steel+chambers.">Effect of heat treatments and coatings on the outgassing rate of stainless steel chambers.</a> J. Vac. Sci. Technol. A. 32 (2), 021604 (2014).</li><li>Sasaki, Y. T. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Reducing+SS+304/316+hydrogen+outgassing+to+2x10&#8722;15+torr+l+/cm2+s.">Reducing SS 304/316 hydrogen outgassing to 2x10&#8722;15 torr l /cm2 s.</a> J. Vac. Sci. Technol. A. 25 (4), 1309-1311 (2007).</li><li>He, P., Hseuh, H. C., Mapes, M., Todd, R., Weiss, D., Wilson, D. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Outgassing+properties+of+the+spallation+neutron+source+ring+vacuum+chambers+coated+with+titanium+nitride.">Outgassing properties of the spallation neutron source ring vacuum chambers coated with titanium nitride.</a> J. Vac. Sci. Technol. A. 22 (3), 705-710 (2004).</li><li>Bernardini, M., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Air+bake-out+to+reduce+hydrogen+outgassing+from+stainless+steel.">Air bake-out to reduce hydrogen outgassing from stainless steel.</a> J. Vac. Sci. Technol. A. 16 (1), 188-193 (1998).</li><li>Park, C., Chung, S., Liu, X., Li, Y. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Reduction+in+hydrogen+outgassing+from+stainless+steels+by+a+medium-temperature+heat+treatment.">Reduction in hydrogen outgassing from stainless steels by a medium-temperature heat treatment.</a> J. Vac. Sci. Technol. A. 26 (5), 1166-1171 (2008).</li><li>Kamiya, J., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Vacuum+chamber+made+of+soft+magnetic+material+with+high+Permeability.">Vacuum chamber made of soft magnetic material with high Permeability.</a> Vacuum. 98, 12-17 (2013).</li><li>Park, C., Ha, T., Cho, B. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Thermal+outgassing+rates+of+low-carbon+steels.">Thermal outgassing rates of low-carbon steels.</a> J. Vac. Sci. Technol. A. 34 (2), 021601 (2016).</li><li>Battes, K., Day, C., Hauer, V. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Outgassing+rate+measurements+of+stainless+steel+and+polymers+using+the+difference+Method.">Outgassing rate measurements of stainless steel and polymers using the difference Method.</a> J. Vac. Sci. Technol. A. 33 (2), 021603 (2015).</li><li>Jousten, K., Putzke, S., Buthig, J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Partial+pressure+measurement+standard+for+characterizing+partial+pressure+analyzers+and+measuring+outgassing+rates.">Partial pressure measurement standard for characterizing partial pressure analyzers and measuring outgassing rates.</a> J. Vac. Sci. Technol. A. 33 (6), 061603 (2015).</li><li>Redhead, P. A. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Recommended+practices+for+measuring+and+reporting+outgassing+data.">Recommended practices for measuring and reporting outgassing data.</a> J. Vac. Sci. Technol. A. 20 (5), 1667-1675 (2002).</li><li>Jousten, K. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Calibration+of+total+pressure+gauges+in+the+UHV+and+XHV+regions.">Calibration of total pressure gauges in the UHV and XHV regions.</a> J. Vac. Soc. Jpn. 37 (9), 678-685 (1994).</li><li>Nemanic, V., Setina, J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Outgassing+in+thin+wall+stainless+steel+cells.">Outgassing in thin wall stainless steel cells.</a> J. Vac. Sci. Technol. A. 17 (3), 1040-1046 (1999).</li><li>Nemanic, V., Setina, J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=A+study+of+thermal+treatment+procedures+to+reduce+hydrogen+outgassing+rate+in+thin+wall+stainless+steel+cells.">A study of thermal treatment procedures to reduce hydrogen outgassing rate in thin wall stainless steel cells.</a> Vacuum. 53, 277-280 (1999).</li><li>Berg, R. F., Fedchak, J. A. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=NIST+Calibration+Services+for+Spinning+Rotor+Gauge+Calibrations.">NIST Calibration Services for Spinning Rotor Gauge Calibrations.</a> Natl. Inst. Stand. Technol. Spec. Publ. , 250-293 (2015).</li><li>Kou, S. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=.">.</a> Welding Metallurgy. , 13-16 (2003).</li><li>Fruehan, R. J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=.">.</a> Vacuum Degassing of Steel. , (1990).</li><li>Fedchak, J. A., Scherschligt, J., Sefa, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=How+to+Build+a+Vacuum+Spring-transport+Package+for+Spinning+Rotor+Gauges.">How to Build a Vacuum Spring-transport Package for Spinning Rotor Gauges.</a> J. Vis. Exp. (110), e53937 (2016).</li><li>Saitoh, M., Shimura, K., Iwata, T., Momose, T., Ishimaru, H. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Influence+of+vacuum+gauges+on+outgassing+rate+measurements.">Influence of vacuum gauges on outgassing rate measurements.</a> J. Vac. Sci. Technol. A. 11 (5), 2816-2821 (1993).</li><li>Calder, R., Lewin, G. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Reduction+of+stainless-steel+outgassing+in+ultra-high+vacuum.">Reduction of stainless-steel outgassing in ultra-high vacuum.</a> Brit. J. Appl. Phys. 18, 1459-1472 (1967).</li></ol>

The authors have no conflict of interest to declare.

Numerous methods for the measurement of outgassing rates have been reported in the literature. Experimental methods include the throughput, conductance modulation, two-path, RoR, and variations of these methods. However, no one method is ideal for obtaining the necessary outgassing data.10 The RoR method using SRG, however, became the method of choice for measurement of low outgassing materials.11-13 SRG17 is often used as a secondary standard in high vacuum systems without erroneous pump...

Steels are routinely used in construction because of their good mechanical properties. Certain steels (ferrous steels, in particular) are preferred materials for applications involving vacuum. Depending on the type and grade, these steels have sufficiently low outgassing rates essential for high vacuum (HV, 10&#8722;7 &#60; p &#60; 10&#8722;5 Pa) or ultrahigh vacuum (UHV, 10&#8722;10 &#60; p &#60; 10&#8722;7 Pa) systems. Further, extensive research has been conducted toward the development of special pretreatment procedures that reduce outgassing1-3. The pretreatment measures are designed to minimize the pumping investment or to improve the vacuum from HV to UHV or from UHV to extreme-high vacuum (p &#60; 10&#8722;10 Pa).
Although many practical methods have been proposed to reduce the outgassing rate of ferrous steels, recent methods are focused on reducing the time and temperature required to obtain a lower outgassing rate. Heat treatment at 350 &#176;C-450 &#176;C rather than vacuum firing at 800 &#176;C-950 &#176;C, is a good example of this approach.1,4,5 Furthermore, choosing the ideal material for a specific vacuum application is critical; for example, selecting a ferritic material with a very low outgassing rate for use in magnetic field shielding.6,7
During such investigations, precise measurement of the outgassing rate is a prerequisite for the screening of candidate materials or verifying the effectiveness of various pretreatment procedures.8,9 The most common experimental techniques used for the measurement of outgassing are the throughput and rate-of-pressure rise methods.10 Recently, various experiments have been conducted to measure the hydrogen outgassing rate based on the RoR method using spinning rotor gauge (SRG).1, 11-13 The RoR method using SRG is highly suitable for measuring very low hydrogen outgassing rates that often limit the lowest pressure achievable in a vacuum system made of steel. This is because the SRG has negligible pumping or outgassing action. Further, the SRG also has excellent accuracy and good linearity in high vacuum and ultra-high vacuum range.14
Given that the published literature on RoR experiments is limited, it is worthwhile to describe the experimental details to develop a deeper understanding of the method. In this video article, we describe in detail the process of setting up the experiment and provide detailed instructions to perform outgassing measurements using the RoR method. To demonstrate the efficacy of the method, the outgassing rates of two commonly used steels (stainless steel 304 and mild steel S20C) were measured before and after a preheat treatment to reduce the hydrogen outgassing rate. The pre- and post-treatment values were compared. Typical experimental results using a rather simple setup are presented to demonstrate the efficacy of the method optimized for evaluating low hydrogen degassing rates.

<table border="0" cellpadding="0" cellspacing="0" width="869">
	<tbody>
		<tr height="33">
			<td colspan="4" height="33" style="height:34px;width:869px;">Sample chamber</td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;width:215px;">Stainless steel, 304</td>
			<td style="width:169px;">POSCO&#160;&#160;&#160;&#160;&#160; (www.posco.co.kr)</td>
			<td style="width:131px;"></td>
			<td></td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;width:215px;">Mild steel, D3752</td>
			<td style="width:169px;">Xiangtan Iron&#38;Steel co.,LTD (http://www.hnxg.com)</td>
			<td style="width:131px;"></td>
			<td style="width:355px;"></td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;width:215px;">Mild steel, D3752</td>
			<td style="width:169px;">SeAh Besteel (www.seahbesteel.co.kr)</td>
			<td style="width:131px;"></td>
			<td style="width:355px;"></td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;width:215px;">Name</td>
			<td style="width:169px;">Company</td>
			<td style="width:131px;">Catalog Number</td>
			<td>Comments</td>
		</tr>
		<tr height="33">
			<td colspan="4" height="33" style="height:34px;width:869px;">Cleaning</td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;width:215px;">Cleaning bath</td>
			<td style="width:169px;">Samill IDS</td>
			<td></td>
			<td style="width:355px;">Ultrasonic cleaning, heating, timer, concentration control&#160;</td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;width:215px;">Acetone</td>
			<td style="width:169px;">Samchun Chemical (www.samchun.com)</td>
			<td style="width:131px;">A1759</td>
			<td style="width:355px;">HPLC GRADE (99.7%)</td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;width:215px;">Tekusolv</td>
			<td style="width:169px;">NCH Co.&#160;&#160;&#160;&#160;&#160;&#160;&#160; (www.nch.com)</td>
			<td style="width:131px;">0368-0058J</td>
			<td style="width:355px;">Solvents</td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;width:215px;">BN cleaner</td>
			<td style="width:169px;">Henkel surface technologies (na.henkel-adhesives.com)</td>
			<td style="width:131px;">6610263775</td>
			<td style="width:355px;">Akkaline, pH 13</td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;width:215px;">Ethanol</td>
			<td style="width:169px;">Fisher Scientific (www.fishersci.com)</td>
			<td style="width:131px;">A995-4</td>
			<td style="width:355px;">HPLC Reagent(99.9%)</td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;width:215px;">Deionized water (Electro deionizer SYSTEM)</td>
			<td style="width:169px;">A.T.A&#160;&#160;&#160;&#160;&#160;&#160;&#160; (www.atagroup.co)</td>
			<td style="width:131px;">EDI SYSTEM</td>
			<td style="width:355px;"></td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;width:215px;">Liquid N2 gas</td>
			<td style="width:169px;">Hanyoung (www.gasmaster.co.kr)</td>
			<td style="width:131px;">B/T 176 L</td>
			<td style="width:355px;">LN2 dewar, purity 99.999%</td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;width:215px;">Name</td>
			<td style="width:169px;">Company</td>
			<td style="width:131px;">Catalog Number</td>
			<td>Comments</td>
		</tr>
		<tr height="33">
			<td colspan="4" height="33" style="height:34px;">Welding</td>
		</tr>
		<tr height="68">
			<td height="68" style="height:68px;">Tungsten Inert Gas wedling machine</td>
			<td style="width:169px;">Thermal Arc (www.victortechnologies.com/thermalarc)</td>
			<td>400GTSW</td>
			<td>Ar gas prefllow&#38;postflow 8 liter/min, backflow 5 liter/min</td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;">turning jig</td>
			<td style="width:169px;">Vactron&#160;&#160;&#160; (www.vactron.co.kr)</td>
			<td style="width:131px;">Made to order</td>
			<td>Made to order</td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;">Ar gas</td>
			<td style="width:169px;">Lindekorea (www.lindekorea.com)</td>
			<td></td>
			<td>Purity 99.999%</td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;width:215px;">Name</td>
			<td style="width:169px;">Company</td>
			<td style="width:131px;">Catalog Number</td>
			<td>Comments</td>
		</tr>
		<tr height="33">
			<td colspan="4" height="33" style="height:34px;">Leak test</td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;width:215px;">Leak detector</td>
			<td style="width:169px;">Adixen&#160;&#160;&#160;&#160; (www.adixen.fr/en/)</td>
			<td style="width:131px;">ASM380</td>
			<td>Pumping Speed(air): 9.7 l/s</td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;">He gas</td>
			<td style="width:169px;">Lindekorea (www.lindekorea.com)</td>
			<td></td>
			<td>Purity 99.999%</td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;width:215px;">Name</td>
			<td style="width:169px;">Company</td>
			<td style="width:131px;">Catalog Number</td>
			<td>Comments</td>
		</tr>
		<tr height="33">
			<td colspan="4" height="33" style="height:34px;width:869px;">Vacuum equipment</td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;width:215px;">Spinning rotor gauge&#160;</td>
			<td style="width:169px;">MKS Instruments (www.mks.com)</td>
			<td style="width:131px;">SRG-3</td>
			<td style="width:355px;">Controller, head, and thimble set</td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;">Industrial level meter</td>
			<td style="width:169px;">MKS Instruments (www.mks.com)</td>
			<td style="width:131px;">SRG-3</td>
			<td>For SRG assemble &#177; 1&#730;</td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;">Oscilloscope</td>
			<td style="width:169px;">Tektronix&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160; (www.tek.com)</td>
			<td>TDS2012B</td>
			<td></td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;width:215px;">Residulal gas analyser</td>
			<td style="width:169px;">Balzers</td>
			<td style="width:131px;">QMA200</td>
			<td>m/e 0-100&#160;</td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;width:215px;">TMP(HiPace 80)</td>
			<td style="width:169px;">Pfeiffer Vacuum (www.pfeiffer-vacuum.com)</td>
			<td style="width:131px;">PMP03941</td>
			<td style="width:355px;">Pumping Speed(N2): 67 l/s</td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;width:215px;">Scroll pump</td>
			<td style="width:169px;">Anest Iwata&#160;&#160;&#160;&#160;&#160;&#160;&#160; (www.anest-iwata.co.jp)</td>
			<td style="width:131px;">ISP 90</td>
			<td>Pumping Speed(Air): 1.8 l/s</td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;width:215px;">All-metall easy close angle valve(CF35)</td>
			<td style="width:169px;">VAT Inc.&#160; (www.vatvalve.com)</td>
			<td style="width:131px;">54032-GE02-0002</td>
			<td style="width:355px;">Rotatable flange</td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;width:215px;">Angle valve(KF25)</td>
			<td style="width:169px;">MDC Vacuum Inc. (www.mdcvacuum.com)</td>
			<td style="width:131px;">KAV-100</td>
			<td style="width:355px;"></td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;width:215px;">Five-Way Crosses&#160;&#160;&#160;&#160;</td>
			<td style="width:169px;">MDC&#160;</td>
			<td style="width:131px;">Made to order</td>
			<td style="width:355px;">CF4-1/2 Spool-rotatable 1-way to CF2-3/4 Nipple 3ea, Vacuum degassed at 400&#8451; for 3 days</td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;width:215px;">Reducing Tees&#160;</td>
			<td style="width:169px;">MDC</td>
			<td style="width:131px;">Made to order</td>
			<td style="width:355px;">CF4-1/2 Flange to CF2-3/4 Tees(Half flange), Vacuum degassed at 400&#8451; for 3 days</td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;width:215px;">Name</td>
			<td style="width:169px;">Company</td>
			<td style="width:131px;">Catalog Number</td>
			<td>Comments</td>
		</tr>
		<tr height="33">
			<td colspan="4" height="33" style="height:34px;">Temperature control&#160;</td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;">Chiller</td>
			<td style="width:169px;">JEIO Tech&#160;&#160; (www.jeiotech.com)</td>
			<td>RW-2025G</td>
			<td></td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;">Cooling line</td>
			<td style="width:169px;">LS Metal&#160;&#160;&#160;&#160; (www.lsmetal.biz)</td>
			<td style="width:131px;">C1100</td>
			<td style="width:355px;">Level Wound Coil, Diameter 10mm</td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;">Heater controllers</td>
			<td style="width:169px;">HMT</td>
			<td style="width:131px;">Made to order</td>
			<td style="width:355px;">Bakeout program controller</td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;">Electrical heater tapes</td>
			<td style="width:169px;">Brisk heat (www.briskheat.com)</td>
			<td>BIH101080L</td>
			<td></td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;">Thermocouple(K type)</td>
			<td style="width:169px;">miraesensor (www.miraesensor.com)</td>
			<td>MR-2290</td>
			<td></td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;">Handheld multimeter</td>
			<td style="width:169px;">Saehan&#160;&#160;&#160;&#160; (www.saehan.co.kr)</td>
			<td>3234</td>
			<td></td>
		</tr>
		<tr height="45">
			<td height="45" style="height:46px;">Data recorder(Temp.)</td>
			<td style="width:169px;">Yokogawa (www.yokogawa.com)</td>
			<td>GP10-1E1F-UC10</td>
			<td></td>
		</tr>
	</tbody>
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measurement of outgassing rates of steels

Steels are commonly used materials in the fabrication of vacuum systems because of their good mechanical, corrosion, and vacuum properties. A variety of steels meet the criterion of low outgassing required for high or ultrahigh vacuum applications. However, a given material can present different outgassing rates depending on its manufacturing process or the various pretreatment processes involved during the fabrication. Thus, the measurement of outgassing rates is highly desirable for a specific vacuum application. For this reason, the rate-of-pressure rise (RoR) method is often used to measure the outgassing of hydrogen after bakeout. In this article, a detailed description of the design and execution of the experimental protocol involved in the RoR method is provided. The RoR method uses a spinning rotor gauge to minimize errors that stem from outgassing or the pumping action of a vacuum gauge. The outgassing rates of two ordinary steels (stainless steel and mild steel) were measured. The measurements were made before and after the heat pretreatment of the steels. The heat pretreatment of steels was performed to reduce the outgassing. Extremely low rates of outgassing (on the order of 10&#8722;11 Pa m3 sec&#8722;1 m&#8722;2) can be routinely measured using relatively small samples.

As expected, the residual gas after the bakeout was mostly hydrogen.7 The pressure rise measured using the SRG was linear over a long period of time (Figure 5). Thus, the readsorption effect might be negligible and the intrinsic outgassing rate (q) for the steels tested in this study can be evaluated using the RoR method.10 The measured pressure rise data was analyzed using the linear least squares fitting method. The outgassing rates of the...

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Measurement of Outgassing Rates of Steels

A protocol for the measurement of outgassing rates of hydrogen from ordinary steel vacuum chambers using the rate-of-pressure rise method is presented.

Steels are commonly used materials in the fabrication of vacuum systems because of their good mechanical, corrosion, and vacuum properties. A variety of ...

The overall goal of this procedure is to measure the outgassing rate of hydrogen from vacuum chambers using the rate of pressure rise method. This method can help answer key questions in the vacuum measurement field, such as measurement of the outgassing rate of very low outgassing materials. The main advantage of this technique is that the outgassing rate can be systematically measured even from extremely low outgassing materials, or relatively small samples.Demonstrating the procedure will be Se-Hyun Kim, a grad student from my laboratory. First, assemble the vacuum components of the experimental apparatus sequentially, using copper gaskets from the pump side to the sample side. Using a wrench, tighten all the flange joints face to face with a copper gasket, except the joint between the sample chamber and the chamber isolation valve.Using a level meter, adjust the spinning rotor gauge, or SRG flange assembly, and the sample chamber, so that the axis of the SRG head is vertical. Tighten the flange joint between the sample chamber and the chamber isolation valve face to face, while maintaining the SRG flange's level. Next, connect the roughing pump and the helium leak detector or HLD with isolating valves to the clamp flange port of the exhaust end of the turbomolecular pump, or TMP.To perform a leak test, turn on the HLD. Once the detector is ready, open the HLD valve, and close the roughing pump valve. Pump down the setup using the HLD, waiting for approximately 30 minutes to pump out the residual helium gas.Ensure that the helium level is within the minimum detectable limit of the HLD. Spray helium gas through the leak test groove on the flanges. Then, measure any change in the helium level ensuring that the chamber is leak tight.If not leaks are detected, stop the leak test, and vent the vacuum system. Then, open the roughing pump valve and close the HLD valve. Pump down the vacuum system by switching on the TMP and the roughing pump at the same time.For bake-out, remove the SRG head from the flange assembly, wrap the vacuum components between the SRG flange assembly and the inlet flange of the TMP and band heaters. Following this, check that there is no electrical short circuit between the heaters and the vacuum parts using a handheld multimeter. Next, connect the heaters to the extension cable, then to their respective heater controllers.Afterwards, wrap the chamber in aluminum foil. Now, raise the temperature of the chamber to 150 degrees celsius, at a ramp rate of one to two degrees celsius per minute. Maintain the temperature of the residual gas analyzer, or RGA electronics, under 50 degrees celsius, using a cooling fan.At this point, de-gas each of the RGA filaments by electron bombardment for at least five minutes. Measure the RGA spectrum from a one to 50 mass to charge ratio, to ensure that the water peak is less than one half of the hydrogen peak. Allow the system to cool down to room temperature at a ramp rate of one to two degrees celsius per minute.Check for leaks referring to the RGA spectrum measured during the cooldown. Next, analyze the residual gas in the sample chamber and measure the RGA spectrum. After closing the chamber isolation valve, measure the RGA spectrum again.Verify that the sum of all impurity gasses, such as water, carbon monoxide, and carbon dioxide is below five percent. Following this, assemble the SRG head on the SRG flange assembly. Using a level meter for reference, ensure that the axis of the SRG head is within plus or minus two degrees max.Start the SRG, and wait for stabilization of the residual drag, which usually takes a few hours. Enter the proper input parameters such as gas, temperature, and measurement interval. While waiting for the signal to stabilize, stabilize the temperature of the sample by switching on the chiller to run cool water through the system.Then, set the fluid temperature to 15 degrees celsius. Following this, start the heater controller for the sample, and set the target temperature to 24 degrees celsius. After closing the oven door, wait for the temperature to stabilize within plus or minus 0.1 degrees celsius.Now, verify that the variation of the offset value of the signal is within plus or minus one times 10 to the minus nine Pascal per second. Check the signal level provided by the SRG controller, which should be at least minus 10 decibels, and ideally between zero and six decibels. Next, check the damping level provided by the SRG controller which should be between minus 35 and minus 60 decibels, and is normally satisfied in the system using the TMP and scroll pump, that is laid on a rubber pad.Gently close the all metal angle valve to start the pressure build up being careful not to subject the SRG to mechanical shock. After closing the door of the oven, acquire pressure data for eight to 24 hours using a computer. Pre-check the measured data to verify that the variation in temperature is within plus or minus 0.1 degrees celsius after stabilization, and that the pressure rise is linear with 10 percent error.Continue to measure data until the pressure rise becomes linear within 10 percent error for at least 16 hours. Finally, turn off all equipment. The residual gas after the bake-out was mostly hydrogen, and the pressure rise was linear over a long period of time.Thus, the reabsorption effect might be negligible, and the intrinsic outgassing rate for the steels tested in this study can be evaluated using the rate of pressure rise method. The measured outgassing rate for untreated STS 304 steel was consistent with reported values, and an approximately 22 fold reduction in outgassing was achieved with the medium temperature heat pre-treatment. While the outgassing rates for untreated mild steels were very low, the outgassing rates were second to the rates of stainless steels after intensive heat treatment.In addition, the outgassing rate for mild steel decreased by only 66 percent following heat treatment, and no significant reduction in outgassing was observed. These measurements strongly suggest that the difference in outgassing between stainless steels and mild steels can be attributed to the differences in the steel making processes, and in particular, the secondary metallurgy processes during which impurity gasses are extracted. Once mastered, this technique can be done in five days, if it is performed properly.While attempting this procedure, it is important to remember to check if there are leaks and to maintain the temperature of the system precisely. After watching this video, you should have a good understanding of how to build the outgassing rate measurement system, and how to measure the outgassing rate systematically, using the rate of pressure rise method.

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11.4K Views.  POSTECH. The overall goal of this procedure is to measure the outgassing rate of hydrogen from vacuum chambers using the rate of pressure rise method. This method can help answer key questions in the vacuum measurement field, such as measurement of the outgassing rate of very low outgassing materials. The main advantage of this technique is that the outgassing rate can be systematically measured even from extremely low outgassing materials, or relatively small samples.Demonstrating the procedur...