Name: fabrication of zero mode waveguides for high concentration single molecule microscopy
Uploaded: 2020-05-12T13:00:00
Description: Watch this Scientific Journal Video about Fabrication of Zero Mode Waveguides for High Concentration Single Molecule Microscopy at JoVE.com

This work was supported by NIH grants R01GM080376, R35GM118139, and NSF Center for Engineering MechanoBiology CMMI: 15-48571 to Y.E.G., and by an NIAID pre-doctoral NRSA fellowship F30AI114187 to R.M.J.

NOTE: All steps can be completed in general lab space.
1. Glass coverslip cleaning
<ol>
	<li>To provide a clean surface for evaporative deposition of colloidal particles, place 24 x 30 mm optical borosilicate glass coverslips (0.16&#8722;0.19 mm thickness) within the grooved inserts of a coplin glass staining jar for cleaning. 
	NOTE: Make sure the coverslips stand upright and are well-separated so that all surfaces are clearly exposed during the cleaning process.</li>
	<li>Pour enough ...

For the colloidal self-assembly (protocol section 2), the use of ethanol rather than water as the suspension solvent speeds the evaporation process so that templates are ready in 2&#8722;3 min after deposition rather than 1&#8722;2 h as in previous methods48,49. The evaporative sedimentation protocol presented here is also simpler than previous sedimentation protocols that require controlling surface tilt, temperature, and air volume above the suspension<sup clas...

An erratum was issued for:&#160;<a href="https://www.jove.com/t/61154">Fabrication of Zero Mode Waveguides for High Concentration Single Molecule Microscopy</a>. A figure was updated.
Figure 3 was updated from:
<img alt="Figure 3" class="xfigimg" src="/files/ftp_upload/61154/61154fig3.jpg" /> 
Figure 3: Representative results from evaporative deposition of colloids. (A) Example of optimal colloid deposition. (B) Example of an acceptable colloid deposition in which conditions were more humid (80% RH) than ideal. Holes in the crystal monolayer are apparent. (C) Example of an acceptable colloid deposition in which conditions were drier (65% RH) than optimal. The monolayer regions are slightly translucent while multilayered areas are white and opaque (perimeter and streaks inward). (D) A colloidal crystal illuminated with white light to highlight the rainbow diffraction from the crystals. (E) AFM image (tapping probe AFM in air) of a monolayer of hexagonally packed polystyrene beads from a successful colloid deposition (scale bar = 10 &#181;m). (F) Expanded AFM image of packed beads (scale bar = 2 &#181;m). <a href="https://www.jove.com/files/ftp_upload/61154/61154fig3large.jpg" target="_blank">Please click here to view a larger version of this figure.</a>
to:
<img alt="Figure 3" class="xfigimg" src="/files/ftp_upload/61154/61154fig3v2.jpg" /> 
Figure 3: Representative results from evaporative deposition of colloids. (A) Example of optimal colloid deposition. (B) Example of an acceptable colloid deposition in which conditions were more humid (80% RH) than ideal. Holes in the crystal monolayer are apparent. (C) Example of an acceptable colloid deposition in which conditions were drier (65% RH) than optimal. The monolayer regions are slightly translucent while multilayered areas are white and opaque (perimeter and streaks inward). (D) A colloidal crystal illuminated with white light to highlight the rainbow diffraction from the crystals. (E) AFM image (tapping probe AFM in air) of a monolayer of hexagonally packed polystyrene beads from a successful colloid deposition (scale bar = 10 &#181;m). (F) Expanded AFM image of packed beads (scale bar = 2 &#181;m). <a href="https://www.jove.com/files/ftp_upload/61154/61154fig3v2large.jpg" target="_blank">Please click here to view a larger version of this figure.</a>

An erratum was issued for:&#160;<a href="https://www.jove.com/t/61154">Fabrication of Zero Mode Waveguides for High Concentration Single Molecule Microscopy</a>. A figure was updated.

Erratum: Fabrication of Zero Mode Waveguides for High Concentration Single Molecule Microscopy

Single-molecule techniques such as single molecule fluorescence resonance energy transfer (smFRET) or single molecule fluorescence correlation spectroscopy (FCS) are powerful tools for molecular biophysics, allowing the study of dynamic movements, conformations, and interactions of individual biomolecules in processes such as transcription1,2,3, translation4,5,6, and many others7. For smFRET, total internal reflection fluorescence (TIRF) microscopy is a common method because many tethered molecules may be followed over time, and the evanescent wave generated by TIR is limited to a 100&#8722;200 nm region adjacent to the coverslip8. However, even with this restriction on excitation volume, fluorophores of interest still need to be diluted to pM or nM ranges in order to detect single molecule signals above background fluorecence9. Since the Michaelis-Menten constants of cellular enzymes are typically in the &#956;M to mM range10, biochemical reactions in single molecule studies are usually much slower than those in the cell. For example, protein synthesis occurs at 15&#8722;20 &#160;amino acids per second in E. coli11,12, while most prokaryotic ribosomes in smFRET experiments translate at 0.1&#8722;1 amino acid per second13. In protein synthesis, crystal structures and smFRET on stalled ribosomes showed that transfer RNAs (tRNAs) fluctuate between &#8216;hybrid&#8217; and &#8216;classical&#8217; states before the tRNA-mRNA translocation step14,15. However, when physiological concentrations of the translocation GTPase factor, EF-G, was present, a different conformation, intermediate between the hybrid and classical states, was observed in smFRET6. Studying dynamic molecular processes at rates and concentrations similar to those in the cell is important, but remains a technical challenge.
A strategy to increase the fluorescent substrate concentration is the use of metal-based, sub-visible wavelength apertures, called zero mode waveguides (ZMWs), to generate confined excitation fields that selectively excite biomolecules localized within the apertures16 (Figure 1). The apertures are typically 100&#8722;200 nm in diameter and 100&#8722;150 nm in depth17. Above a cutoff wavelength related to the size and shape of the wells (&#955;c &#8776; 2.3 times the diameter for circular waveguides with water as the dielectric medium18), no propagating modes are allowed in the waveguide, hence the term zero mode waveguides. However, an oscillating electromagnetic field, termed an evanescent wave, exponentially decaying in intensity still tunnels a short distance into the waveguide18,19. Although similar to TIR evanescent waves, ZMW evanescent waves have a shorter decay constant, resulting in 10&#8722;30 nm effective excitation region within the waveguide. At micromolar concentrations of fluorescently labeled ligands, only one or a few molecules are simultaneously present within the excitation region. This restriction of the excitation volume and consequent reduction of background fluorescence enables fluorescence imaging of single molecules at biologically relevant concentrations. This has been applied to many systems20, including FCS measurements of single protein diffusion21, single molecule FRET measurements of low-affinity ligand-protein22 and protein-protein interactions23, and spectro-electrochemical measurements of single molecular turnover events24.
ZMWs have been produced by directly patterning a metal layer using ion beam milling25,26 or electron beam lithography (EBL) followed by plasma-etching16,27. These maskless lithography methods create waveguides in series and typically require access to specialized nanofabrication facilities, preventing widespread adoption of ZMW technology. Another method, ultraviolet nanoimprint lithography lift-off28, uses a quartz slide mold to press an inverse ZMW template onto a resist film like a stamp. While this method is more streamlined, it still requires EBL for fabrication of the quartz mold. This article presents the protocol for a simple and inexpensive templated fabrication method that does not require EBL or ion-beam milling and is based on close-packing of nanospheres to form a lithographic mask.
Nanosphere or &#8220;natural&#8221; lithography, which was first proposed in 1982 by Deckman and Dunsmuir29,30, uses the self-assembly of monodisperse colloidal particles, ranging from tens of nanometers to tens of micrometers31, to create templates for surface patterning via etching and/or deposition of materials. The two-dimensional (2D) or three-dimensional (3D) extended periodic arrays of colloidal particles, referred to as colloidal crystals, are characterized by a bright iridescence from scattering and diffraction32. Although less widely used than electron-beam or photolithography, this masking methodology is simple, low cost, and easily scaled down to create feature sizes below 100 nm.
Directing the self-assembly of colloidal particles determines the success of using colloidal crystals as masks for surface patterning. If the size and shape of particles are homogeneous, colloidal particles can be readily self-assembled with hexagonal packing, driven by entropic depletion33. Water evaporation after drop-coating is an effective route to sediment the colloidal particles, although other methods include dip-coating34, spin coating35, electrophoretic deposition36, and consolidation at an air-water interface37. The protocol presented below is based on the evaporation sedimentation method, which was the simplest to implement. The triangular interstices between close-packed polystyrene beads form openings in which to plate a sacrificial metal, forming posts (Figure 2 and Supplemental Figure 1). Brief annealing of the beads before this step adjusts the shape and diameter of these posts. The beads are removed, a final metal layer is deposited around the posts, and then the posts are removed. After the two metal deposition steps onto the colloidal nanomask, removal of the intermediate posts, and surface chemistry modification for passivation and tethering, ZMW arrays are ready to use for single molecule imaging. More extensive characterization of the ZMW optical properties after fabrication can found in an accompanying article38. Besides a thermal evaporator for vapor deposition of the metals, no specialized tools are required.

<table border="0" cellpadding="0" cellspacing="0" style="width:667px;" width="668">
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		<tr height="21">
			<td height="21" style="height:21px;width:215px;">1. Glass Coverslip Cleaning</td>
			<td style="width:103px;"></td>
			<td style="width:119px;"></td>
			<td style="width:231px;"></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:215px;">Acetone</td>
			<td style="width:103px;">Sigma</td>
			<td style="width:119px;">32201</td>
			<td>1 L</td>
		</tr>
		<tr height="42">
			<td height="42" style="height:42px;width:215px;">Coplin glass staining jar</td>
			<td style="width:103px;">Fisher Scientific</td>
			<td style="width:119px;">08-817</td>
			<td>Staining jar with 8 grooves and molded glass cover</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:215px;">Coverslips</td>
			<td style="width:103px;">VWR</td>
			<td style="width:119px;">48404-467</td>
			<td>24 mm x 30 mm (No.1&#189;, Rectangular)</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:215px;">Ethanol</td>
			<td style="width:103px;">Sigma</td>
			<td style="width:119px;">E7023</td>
			<td>1 L</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:215px;">KOH</td>
			<td style="width:103px;">Sigma</td>
			<td style="width:119px;">30603</td>
			<td>Potassium hydroxide</td>
		</tr>
		<tr height="42">
			<td height="42" style="height:42px;width:215px;">Petri dishes</td>
			<td style="width:103px;">Fisher Scientific</td>
			<td style="width:119px;">R80115TS</td>
			<td>100 mm diameter, 15 mm deep</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:215px;">Sonicator</td>
			<td style="width:103px;">Branson</td>
			<td style="width:119px;">Z245143</td>
			<td>Tabletop ultrasonic cleaner, 5510</td>
		</tr>
		<tr height="42">
			<td height="42" style="height:42px;width:215px;">2. Evaporative Deposition of Polystyrene Beads</td>
			<td style="width:103px;"></td>
			<td style="width:119px;"></td>
			<td></td>
		</tr>
		<tr height="42">
			<td height="42" style="height:42px;width:215px;">Clear storage container</td>
			<td style="width:103px;">Fisher Scientific</td>
			<td style="width:119px;">50-110-8222</td>
			<td>26 x 18 x 15 in.</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:215px;">Desk fan</td>
			<td style="width:103px;">O2Cool</td>
			<td style="width:119px;">FD05001A</td>
			<td>Any small desk (~5 in.) fan will work</td>
		</tr>
		<tr height="42">
			<td height="42" style="height:42px;width:215px;">Glass beaker</td>
			<td style="width:103px;">Fisher Scientific</td>
			<td style="width:119px;">02-555-25B</td>
			<td>250 mL</td>
		</tr>
		<tr height="42">
			<td height="42" style="height:42px;width:215px;">Humidity meter</td>
			<td style="width:103px;">Fisher Scientific</td>
			<td style="width:119px;">11-661-19</td>
			<td></td>
		</tr>
		<tr height="42">
			<td height="42" style="height:42px;width:215px;">Microcentrifuge tubes</td>
			<td style="width:103px;">Fisher Scientific</td>
			<td style="width:119px;">21-402-903</td>
			<td>1.5 mL</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:215px;">Polystyrene microspheres</td>
			<td style="width:103px;">Polysciences</td>
			<td style="width:119px;">18602-15</td>
			<td>1.00 &#181;m diameter, non-functionalized</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:215px;">Triton X-100 deturgent</td>
			<td style="width:103px;">Sigma</td>
			<td style="width:119px;">X100</td>
			<td>100 mL</td>
		</tr>
		<tr height="63">
			<td height="63" style="height:63px;width:215px;">3. Bead Annealing for Reducing Pore Size in the Colloidal Crystal Template</td>
			<td style="width:103px;"></td>
			<td style="width:119px;"></td>
			<td></td>
		</tr>
		<tr height="42">
			<td height="42" style="height:42px;width:215px;">Aluminum plate</td>
			<td style="width:103px;">Fisher Scientific</td>
			<td style="width:119px;">AA11062RY</td>
			<td>Customized in-house to 14 cm x 14 cm</td>
		</tr>
		<tr height="42">
			<td height="42" style="height:42px;width:215px;">Ceramic hotplate</td>
			<td style="width:103px;">Fisher Scientific</td>
			<td style="width:119px;">HP88857100</td>
			<td>13 x 8.2 x 3.8 in.</td>
		</tr>
		<tr height="42">
			<td height="42" style="height:42px;width:215px;">Temperature controller</td>
			<td style="width:103px;">McMaster-Carr</td>
			<td style="width:119px;">38615K71</td>
			<td>Read temperature with thermocouple probe</td>
		</tr>
		<tr height="42">
			<td height="42" style="height:42px;width:215px;">Thermocouple probe</td>
			<td style="width:103px;">McMaster-Carr</td>
			<td style="width:119px;">9251T93</td>
			<td>Type K, surface probe</td>
		</tr>
		<tr height="63">
			<td height="63" style="height:63px;width:215px;">4/5. Nanofabrication of Zero Mode Waveguides Using the Colloidal Crystal Template</td>
			<td style="width:103px;"></td>
			<td style="width:119px;"></td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:215px;">Aluminum etchant</td>
			<td style="width:103px;">Transene</td>
			<td style="width:119px;">Type A</td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:215px;">Aluminum pellets</td>
			<td style="width:103px;">Kurt J. Lesker</td>
			<td style="width:119px;">EVMAL40QXHB</td>
			<td>For electron beam evaporation</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:215px;">Chloroform</td>
			<td style="width:103px;">Sigma</td>
			<td style="width:119px;">288306</td>
			<td>1 L</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:215px;">Copper etchant</td>
			<td style="width:103px;">Transene</td>
			<td style="width:119px;">49-1</td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:215px;">Copper pellets</td>
			<td style="width:103px;">Kurt J. Lesker</td>
			<td style="width:119px;">EVMCU40QXQA</td>
			<td>For electron beam evaporation</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:215px;">Gold pellets</td>
			<td style="width:103px;">Kurt J. Lesker</td>
			<td style="width:119px;">EVMAUXX40G</td>
			<td>For electron beam evaporation</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:215px;">Lens paper</td>
			<td style="width:103px;">Thorlabs</td>
			<td style="width:119px;">MC-5</td>
			<td></td>
		</tr>
		<tr height="42">
			<td height="42" style="height:42px;width:215px;">Plasma cleaner</td>
			<td style="width:103px;">Harrick Plasma</td>
			<td style="width:119px;">PDC-32G</td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:215px;">Scotch tape</td>
			<td style="width:103px;">Staples</td>
			<td style="width:119px;">MMM119</td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:215px;">Thin film deposition system</td>
			<td style="width:103px;">Kurt J. Lesker</td>
			<td style="width:119px;">PVD-75</td>
			<td>Tabletop thermal evaporation system will also work</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:215px;">Titanium pellets</td>
			<td style="width:103px;">Kurt J. Lesker</td>
			<td style="width:119px;">EVMTI45QXQA</td>
			<td>For electron beam evaporation</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:215px;">Toluene</td>
			<td style="width:103px;">Sigma</td>
			<td style="width:119px;">244511</td>
			<td>1 L</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:215px;">Representative Results</td>
			<td style="width:103px;"></td>
			<td style="width:119px;"></td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;">COMSOL Multiphysics Modeling Software</td>
			<td>COMSOL, Inc.</td>
			<td style="width:119px;"></td>
			<td></td>
		</tr>
		<tr height="42">
			<td height="42" style="height:42px;width:215px;">Dual View spectral splitter</td>
			<td style="width:103px;">Photometrics, Inc.</td>
			<td style="width:119px;"></td>
			<td></td>
		</tr>
	</tbody>
</table>

fabrication of zero mode waveguides for high concentration single molecule microscopy

In single molecule fluorescence enzymology, background fluorescence from labeled substrates in solution often limits fluorophore concentration to pico- to nanomolar ranges, several orders of magnitude less than many physiological ligand concentrations. Optical nanostructures called zero mode waveguides (ZMWs), which are 100&#8722;200 nm in diameter apertures fabricated in a thin conducting metal such as aluminum or gold, allow imaging of individual molecules at micromolar concentrations of fluorophores by confining visible light excitation to zeptoliter effective volumes. However, the need for expensive and specialized nanofabrication equipment has precluded the widespread use of ZMWs. Typically, nanostructures such as ZMWs are obtained by direct writing using electron beam lithography, which is sequential and slow. Here, colloidal, or nanosphere, lithography is used as an alternative strategy to create nanometer-scale masks for waveguide fabrication. This report describes the approach in detail, with practical considerations for each phase. The method allows thousands of aluminum or gold ZMWs to be made in parallel, with final waveguide diameters and depths of 100&#8722;200 nm. Only common lab equipment and a thermal evaporator for metal deposition are required. By making ZMWs more accessible to the biochemical community, this method can facilitate the study of molecular processes at cellular concentrations and rates.

The self-assembly of the polystyrene colloidal particles via evaporative sedimentation (steps 2.1&#8722;2.13) can produce a range of results since it requires control of the solvent evaporation rate. However, because the depositions are fast (10&#8722;15 min per round), the procedure can be quickly optimized for different ambient lab conditions. Figure 3A shows a well-formed colloidal template after deposition and evaporation. Macroscopically, the region of beads is circular, with borders de...

Watch this Scientific Journal Video about Fabrication of Zero Mode Waveguides for High Concentration Single Molecule Microscopy at JoVE.com

Fabrication of Zero Mode Waveguides for High Concentration Single Molecule Microscopy

Described here is a nanosphere lithography method for parallel fabrication of zero mode waveguides, which are arrays of nanoapertures in a metal-clad glass microscopy coverslip for single molecule imaging at nano- to micromolar concentrations of fluorophores. The method takes advantage of colloidal crystal self-assembly to create a waveguide template.

In single molecule fluorescence enzymology, background fluorescence from labeled substrates in solution often limits fluorophore concentration to pico- to ...

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